DRP-03
Equipment Name:
DRP-03
Category:
Dry Pumps
Make:
Varian
Model:
TS300 (PTS03001UVPI)
Serial No:
LP0901L024
Location:
BNMR Load Lock
Motor/compressor power:
115Volts
Pumping speed:
8.8 cfm
Maintenance Link:
Instruction manual:
| Attachment | Size |
|---|---|
 Installation and Operation Manual | 1.87 MB |
