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DRP-03

Equipment Name: 
DRP-03
Category: 
Dry Pumps
Make: 
Varian
Model: 
TS300 (PTS03001UVPI)
Serial No: 
LP0901L024
Location: 
BNMR Load Lock
Motor/compressor power: 
115Volts
Pumping speed: 
8.8 cfm
Instruction manual: 
PDF icon Installation and Operation Manual