MuQuip-CMMS Group Equipment
leak check --28 Sep 2004 : IVC &OVC leak check OK. BG: 4E-8 (before zeroing) 1E-9 (after zeroing) Flow test OK with 500mb He4 in gas handeling system. BG n IVC & OVC 3E-8(before zeroing) 2E-9 (after zeroing)