DRP-02
Equipment Name:
DRP-02
Category:
Dry Pumps
Make:
Varian
Model:
TS300 (PTS03001UNIV)
Serial No:
LPB38491
Location:
BNQR Load Lock
Motor/compressor power:
115Volts
Pumping speed:
8.8 cfm
Maintenance Link:
Instruction manual:
| Attachment | Size |
|---|---|
 Installation and Operation Manual | 1.87 MB |
