Maintenance for OLP-11
Date:
Wednesday, February 8, 2012
Synopsis:
Oil changed
Equipment/Beam Line:
Description:
Oil changed. Old oil was yellow. tested with back streaming filter to <60mtorr and without to <20mtorr. reinstalled into cart.
Oil changed. Old oil was yellow. tested with back streaming filter to <60mtorr and without to <20mtorr. reinstalled into cart.